Several metal oxide thin films were grown on Si substrate by pulsed laser deposition for controlling adsorption of proteins. No intentional heating of substrate and introduction of oxygen gas during growth were employed. Additionally, fibrinogen, bovine serum albumin (BSA), and lysozyme were used as model protein in this study. The film properties such as cyratllinity, surface roughness, surface electrical charge and chemistry were investigated by many techniques in order to obtain the relationship with protein adsorption.

Firstly, as grown Ta₂O₅ and ZnO thin film were used to study the effects of surface charge on the behaviors of BSA and lysozyme adsorption. The protein thickness results by ellipsometry showed that negatively charged Ta₂O₅ had a stronger affinity to positively charged lysozyme, while positively charged ZnO had a stronger affinity to negatively charged BSA. The results confirmed electrostatic interaction due to surface charge is one of main factors for determining adsorption of proteins.

Furthermore, annealing studies were performed by heat treatment of as grown Ta₂O₅ and ZnO at 800°C in air ambience. Annealed Ta₂O₅ thin film had almost wetting property (from 10.02° to less than 1∼2°) and the change of cystallinity (from amorphous to cyrsalline) while annealed ZnO thin film had a reduced contact angle (from 75.65° to 39.41°) and remained to crystalline structure. The fibrinogen thickness on annealed Ta₂O₅ film was increased compared with as grown sample, while heat treated ZnO film showed much reduction of fibrinogen adsorption.

Binary Ta-Zn oxide thin films (TZ) were grown by preparing PLD target composed of 50 wt% Ta₂O₅ and 50 wt% ZnO. This binary film had IEP pH 7.1 indicating nearly neutral charge in pH 7.4 PBS solution, and hydrophilic property. Ellipsometrical results showed that TZ film had the lowest fibrinogen, BSA and lysozyme thickness after 120 min adsorption compared with Ta₂O₅ and ZnO. Other samples, bilayer oxide films in which Ta2O₅ and ZnO coexist were also employed to study adsorption behaviors. Especially, Ta₂O ₅-based bilayer films revealed zero adsorption of lysozyme.