Micro-Electro-Mechanical Systems (MEMS) is a technology that can be defined as microfabricated mechanical and electro-mechanical elements (i.e., devices and structures). Over the past several decades MEMS researchers and developers have demonstrated an extremely large number of applications such as Microsensors, Microactuators, Accelerometers, Micromirrors etc.

Silicon is by-far the most preferred material of choice to build MEMS. However, Silicon does fall short in applications that involve harsh environments and areas such as biological, chemical MEMS sensing etc. This is where Carbon scores over Silicon because of its advantageous properties like better polymerization, wide electrochemical stability window, biocompatibility etc.

The present work starts by introducing the basic techniques used to fabricate Carbon-MEMS. Processes are then explained to produce different types C-MEMS electrodes which can be further developed into novel biosensors, microbattery etc. The main aim of this study was to compare the different types of C-MEMS electrodes and conclude which type would be the best to further develop applications from.

Application such as a micro-battery requires electrodes to have high surface area as more the surface area, more is the charge stored. For an application such as biosensors, surface area of the electrode affects the sensitivity and accurateness of the sensor. Thus an electrode with high surface area is always desirable. In this work, different C-MEMS electrodes having fractal structures were fabricated and compared for their surface area. The C-MEMS electrodes were characterized using Cyclic Voltammetry (CV), Electrochemical Impedance Spectroscopy (EIS) and Brunauer-Emmett-Teller (BET) technique. It was found that the sample Carbonized RF gel with Long carbon fibers had the largest surface area out of all the different types.