A study of the etching and surface modification characteristics of polyimide films for use as a dielectric layer in multi-chip modules
by Mannarino, Matthew Marchand, M.S., UNIVERSITY OF MASSACHUSETTS LOWELL, 2008, 90 pages; 1456314

Abstract:

Electronics packaging has evolved significantly over the past half-century from I hard-wired components to metal-plated ceramic substrates to the current era of microelectronics as multi-layered polymeric substrates. The limits of the current technology for multi-chip modules (MCM-D's) are the functionality and processing of the dielectric (polyimide) layer. Methods of improving the production of MCM-D's by using a self-adhesive dielectric film as well as evaluating potentially better alternative polyimide substrates are investigated. The effects of surface modification of the dielectric films by reactive ion etching (RIE) and argon plasma etching are also examined. By balancing material properties, processing conditions, and plasma modification of the polyimide films, smaller and more efficient MCM-D's can be produced.

 
AdviserStephen Burke Driscoll
SchoolUNIVERSITY OF MASSACHUSETTS LOWELL
SourceMAI/ 47-01, p. , Sep 2008
Source TypeThesis
SubjectsElectrical engineering; Materials Science; Plastics
Publication Number1456314
Adobe PDF Access the complete dissertation:
 

» Find an electronic copy at your library.
  Use the link below to access a full citation record of this graduate work:
  http://gateway.proquest.com/openurl%3furl_ver=Z39.88-2004%26res_dat=xri:pqdiss%26rft_val_fmt=info:ofi/fmt:kev:mtx:dissertation%26rft_dat=xri:pqdiss:1456314
  If your library subscribes to the ProQuest Dissertations & Theses (PQDT) database, you may be entitled to a free electronic version of this graduate work. If not, you will have the option to purchase one, and access a 24 page preview for free (if available).

About ProQuest Dissertations & Theses
With over 2.3 million records, the ProQuest Dissertations & Theses (PQDT) database is the most comprehensive collection of dissertations and theses in the world. It is the database of record for graduate research.

The database includes citations of graduate works ranging from the first U.S. dissertation, accepted in 1861, to those accepted as recently as last semester. Of the 2.3 million graduate works included in the database, ProQuest offers more than 1.9 million in full text formats. Of those, over 860,000 are available in PDF format. More than 60,000 dissertations and theses are added to the database each year.

If you have questions, please feel free to visit the ProQuest Web site - http://www.proquest.com - or call ProQuest Hotline Customer Support at 1-800-521-3042.